关键字导读: ETCH PVD PECVD MOCVD MEMS CMP COATING CLEAN DETECT TRACK
miaoxie: gaoganjingpinji，gaosuchuanpian，pengzhuangyanhu，mapping，semirenzhengs2，f47，fengyingtexinghuashexiangshouzhijijiekouyonghukedingzhi。
简介
introduction
ouhechuandong、sifuqudong、ganjingchuandongjiguanghua、scarashoubeiguihua，jubeizhanyongkongjianxiao、dashensuobi、gaojingdu、gaoganjingdudengzhangchu。fengyingtexinghuashexiang，shouzhijijiekouyonghukedingzhi，shoujihuajiezhitixi，gaosuchuanpianxiaolihepengzhuangyanhugongxiao，semirenzhengs2、f47，mcbfdayu1000wanci。danrenshixianjingyuanzaifoup、huanchongshi、gongyiweizhidengzhijiandezhudongchuandi。shibandaotixingyedeyoushengzhitiaoxuan。
参数
parameter
| 规划情势Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
|---|---|---|
| 负载Payload | 称号name | 晶圆wafer |
| 直径diameter | Φ200mm/Φ300mm | |
| 分量weight | ≤0.5kg | |
| 自在度数DOF | 4 | |
| 手数目Number of Arm | 2 | |
| 最大反转展转直径Maximum Swing diameter | 520mm | |
huodongguimo Moving Range | 起落轴 (Z轴)Up/Down( Z)-Axis | 450mm |
| 反转展转轴 (T轴) Rotational(T)-Axis | 350° | |
| 舒展轴 (R轴) Extension(Z)-Axis | R760mm | |
zuidasulv Maximum Moving Speed | 起落轴 (Z轴)Up/Down( Z)-Axis | 375mm/s |
| 反转展转轴 (T轴) Rotational(T)-Axis | 360° | |
| 舒展轴 (R轴) Extension(Z)-Axis | 1100mm/s | |
fanfudingweijingdu Repeatability | 起落轴 (Z轴)Up/Down( Z)-Axis | ±0.1 mm(3σ) |
| 反转展转轴 (T轴) Rotational(T)-Axis | ±0.01°(3σ) | |
| 舒展轴 (R轴) Extension(Z)-Axis | ±0.1 mm(3σ) | |
| 干净度Clean Class | CLASS 1 | |
| 主机分量Body Weight | 70 kg | |
| 电源Power Supply | VAC 220V±10% | |
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