PINUS1-B

关键字导读: PECVD PVD ETCH MEMS

miaoxie: zhiqujidianguihua,quanxindeiomokuai,jubeijinbuqianbeidefangpengzhuangyanhugongxiaojishuchujingqidenghaozhiyingjianjianduangongxiao,jubeisemirenzheng。zhizutezhenghuashexiangchengchiyonghudingzhi,shoubeizhangdukexuan,keweikehugongjijiekoujijieweidingzhibanshi。

简介

introduction

zhiqujidianguihuajubeigenggaodezhenkongtezheng,waibuguihuabuchilun,pidaidengbujian,tixiyunzhuandeanwenxinggenghao,kaodezhuxinggenggao。quanxindeiomokuai,jubeigengduodeshuchushuchuyinjiao,yonghunenggouanzhaoxuyaoshezhishebeibaishechenghusuo,chuanganqijiancedenggongxiao。shuchujingqidenghaozhiyingjianjianduangongxiao,bianlikehushezhishebeibaisheawcdengweizhisuocungongxiaoliyong。daiyouningjingqushezhishebeibaishegongxiaohehuoluodepengzhuangyanhugongxiao,jianhanyonghuwucaozongzhishidegeleisangshi。daiyoudapingmujixierenshijiaoqi,bianlidiaoshizhiyuanliyong,bingchengchirechabagongxiao。nenggouanzhaokehuliyongdetebieqingqiu,dingzhishoubeichicun,zzhoulucheng,naidiwennaiqinshitezhengdeng。


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参数

parameter


本体分量Body Weight50KG
合用晶圆尺寸Wafer Size300mm/200mm/150mm/125mm/100mm
负载Payload1KG
电源输出Power SupplyAC电压:100-240V    AC频次: 50HZ/60HZ
节奏Bear4s-8.1s(Pick,Rotate180°,Place,按照手指资料,传输位置差别相干)
静态误差改正精度(AWC)±0.1mm
反复定位精度RepeatabilityZ: ±0.05mm(3σ)
T: ±0.003°(3σ)
R: ±0.05mm(3σ)
漏率Leak rate<  1 x 10E-9 std. cc/sec He
真空度Base Pressure5X10-9Torr

heyongwendu applicable  temperature

法兰:<120℃;本体:<50℃;手臂:<120℃

ganjingduclean class

ISO  CLASS1

mcbf

>1100million cycles

fuhehuodong compound  motion

撑持Support
PC长途操纵软件撑持Support
通讯接口Communications

ethernet/chuankouserial interface

IO互锁IO interlock

chengchisupport

宁静区Safe area

chengchisupport

pengzhuangyanhucollision  protection

chengchisupport



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