关键字导读: PECVD PVD ETCH MEMS
miaoxie: zhiqujidianguihua，quanxindeiomokuai，jubeijinbuqianbeidefangpengzhuangyanhugongxiaojishuchujingqidenghaozhiyingjianjianduangongxiao，jubeisemirenzheng。zhizutezhenghuashexiangchengchiyonghudingzhi，shoubeizhangdukexuan，keweikehugongjijiekoujijieweidingzhibanshi。
introduction
zhiqujidianguihuajubeigenggaodezhenkongtezheng，waibuguihuabuchilun，pidaidengbujian，tixiyunzhuandeanwenxinggenghao，kaodezhuxinggenggao。quanxindeiomokuai，jubeigengduodeshuchushuchuyinjiao，yonghunenggouanzhaoxuyaoshezhishebeibaishechenghusuo，chuanganqijiancedenggongxiao。shuchujingqidenghaozhiyingjianjianduangongxiao，bianlikehushezhishebeibaisheawcdengweizhisuocungongxiaoliyong。daiyouningjingqushezhishebeibaishegongxiaohehuoluodepengzhuangyanhugongxiao，jianhanyonghuwucaozongzhishidegeleisangshi。daiyoudapingmujixierenshijiaoqi，bianlidiaoshizhiyuanliyong，bingchengchirechabagongxiao。nenggouanzhaokehuliyongdetebieqingqiu，dingzhishoubeichicun，zzhoulucheng，naidiwennaiqinshitezhengdeng。
parameter
| 本体分量Body Weight | 50KG |
|---|---|
| 合用晶圆尺寸Wafer Size | 300mm/200mm/150mm/125mm/100mm |
| 负载Payload | 1KG |
| 电源输出Power Supply | AC电压:100-240V AC频次: 50HZ/60HZ |
| 节奏Bear | 4s-8.1s(Pick,Rotate180°,Place,按照手指资料，传输位置差别相干) |
| 静态误差改正精度(AWC) | ±0.1mm |
| 反复定位精度Repeatability | Z: ±0.05mm（3σ） |
| T: ±0.003°（3σ） | |
| R: ±0.05mm（3σ） | |
| 漏率Leak rate | < 1 x 10E-9 std. cc/sec He |
| 真空度Base Pressure | 5X10-9Torr |
heyongwendu applicable temperature | 法兰:<120℃;本体:<50℃;手臂:<120℃ |
ganjingduclean class | ISO CLASS1 |
mcbf | >1100million cycles |
fuhehuodong compound motion | 撑持Support |
| PC长途操纵软件 | 撑持Support |
| 通讯接口Communications | ethernet/chuankouserial interface |
| IO互锁IO interlock | chengchisupport |
| 宁静区Safe area | chengchisupport |
pengzhuangyanhucollision protection | chengchisupport |
