SRBZ1440A

关键字导读: ETCH PVD PECVD MOCVD MEMS

miaoxie: jienaciliutimifengshouyi,shoujihuajiezhitixi,jubeijinbuqianbeidefangpengzhuangyanhugongxiaojijingtaijiupiangongxiao,jubeisemirenzheng,mcbfdayu1000wanci,tongshijubeichaogaoganjingdu,naidiwen、naiqinshi,fuzaicainengqiangdengtese。zhizutexinghuashexiangchengchiyonghudingzhi,fuzai、shoubeizhangdukexuan,keweikehugongjijiekoujijieweidingzhibanshi。shidafuzaizhenkongjixieshoudeyoushengzhixuan。

简介

introduction

dafuzaizhenkongjixieshou, ledxinpianzhizuofanchoudezhenkongjixieshouchanwu,shouyaoyongyuledxinpianzhizuojinchengzhong,wanchengzhuangyoudapiledjingyuandetuopanzaigegegongyiqiangshijiandechuandi,jubeizhenkongdugao,fuzaida,chuanshuxiaoligao,naidiwendengtese,dadajinbuleledxinpianchuchanzhizuodelianglvhexiaoli,shiledxinpianzhizuoshebeideguanjianchanwu。chuantongdeledxinpianzhizuojienajichengdianluzhizuozhichengliyongdezhenkongjixieshou,qifuzaicainengzhiyao1kg。benchanwuzaijichengdianluzhizuoyongzhenkongjixieshoudegenbenshang,zhenduiqidafuzaixuyao,liyileqichuanshuguihuahejiezhijilv,shiqikeyihuoxudaoda20.5kgdefuzaicaineng,tongshijianchihenxiaodezhanyongtiji,jianchigaonaizhenkongdujiganjingpinji。


更多概略,请单击秒速时时彩彩票 干净产物材料库

参数

parameter


规划情势Mechanical Structure柱坐标型/SCARA型 Cylindrical Coordinate/SCARA
驱动体例Driving method伺服机电Servo Motor
手数目Number of Arm单臂Single Arm
负载Payload称号name托盘Tray
直径diameterΦ710mm
分量weight≤10.5kg
自在度数DOF3
手臂长度Arm Length355mm

shouzhizhangdu(zhuangzhizhongjianzhiguipianzhongjian)

Finger  length(distance from install center to wafer center)
765mm

huodongguimo

Moving  Range
Z轴Z-axis

150mm

R轴,机械手扭转中间至工艺腔中间 R-axis, robot center to process chamber center极限(Ultimate)1440mm
θ轴θ-axis无穷反转展转Infinite Rotation

quanluchengzuixiaoshihou

Minimum running time
Z轴Z-axis1s/35mm
R轴R-axis5s/伸出或缩回Extend or Retraction
θ轴θ-axis5s/180°

fanfudingweijingdu

Repeatability
θ轴(°)θ-Axis±0.01(3σ)
R轴(mm)R-Axis±0.1(3σ)

jixieshoudaiφ710mmfuzaihouzuixiaofanzhuanzhanzhuanzhijing

Robot  minimum turning diameter with Φ 710 mm load
1530mm

shenchu1440mmfuzaizhijing710mmzuiqianduanxiachuiliang

The  front sag of robot which out of 1440mm with Φ 710 mm load
5.5mm
反复定位精度Repeatability±0.2mm
耐真空度Base Pressure (Pa)10­-6Pa
分量Weight机械抄本体Main-body100kg
节制器Controller15kg
碰撞掩护Collision Protect Function

盘片和机械手无毁伤/工位需从头校准
             Disc  and robot without damage/need  to recalibrate position



秒速时时彩彩票 快乐飞艇1.999 秒速快三 秒速快三官网 加拿大28平台 加拿大28注册 幸运赛车彩票 快乐飞艇开奖记录 极速飞艇彩票 十一选五平台 加拿大pc官网