关键字导读: ETCH PVD PECVD MOCVD MEMS
miaoxie: jienaciliutimifengshouyi，shoujihuajiezhitixi，jubeijinbuqianbeidefangpengzhuangyanhugongxiaojijingtaijiupiangongxiao，jubeisemirenzheng，mcbfdayu1000wanci，tongshijubeichaogaoganjingdu，naidiwen、naiqinshi，fuzaicainengqiangdengtese。zhizutexinghuashexiangchengchiyonghudingzhi，fuzai、shoubeizhangdukexuan，keweikehugongjijiekoujijieweidingzhibanshi。shidafuzaizhenkongjixieshoudeyoushengzhixuan。
introduction
dafuzaizhenkongjixieshou， ledxinpianzhizuofanchoudezhenkongjixieshouchanwu，shouyaoyongyuledxinpianzhizuojinchengzhong，wanchengzhuangyoudapiledjingyuandetuopanzaigegegongyiqiangshijiandechuandi，jubeizhenkongdugao，fuzaida，chuanshuxiaoligao，naidiwendengtese，dadajinbuleledxinpianchuchanzhizuodelianglvhexiaoli，shiledxinpianzhizuoshebeideguanjianchanwu。chuantongdeledxinpianzhizuojienajichengdianluzhizuozhichengliyongdezhenkongjixieshou，qifuzaicainengzhiyao1kg。benchanwuzaijichengdianluzhizuoyongzhenkongjixieshoudegenbenshang，zhenduiqidafuzaixuyao，liyileqichuanshuguihuahejiezhijilv，shiqikeyihuoxudaoda20.5kgdefuzaicaineng，tongshijianchihenxiaodezhanyongtiji，jianchigaonaizhenkongdujiganjingpinji。
parameter
| 规划情势Mechanical Structure | 柱坐标型/SCARA型 Cylindrical Coordinate/SCARA | |
|---|---|---|
| 驱动体例Driving method | 伺服机电Servo Motor | |
| 手数目Number of Arm | 单臂Single Arm | |
| 负载Payload | 称号name | 托盘Tray |
| 直径diameter | Φ710mm | |
| 分量weight | ≤10.5kg | |
| 自在度数DOF | 3 | |
| 手臂长度Arm Length | 355mm | |
shouzhizhangdu（zhuangzhizhongjianzhiguipianzhongjian） Finger length(distance from install center to wafer center) | 765mm | |
huodongguimo Moving Range | Z轴Z-axis | 150mm |
| R轴，机械手扭转中间至工艺腔中间 R-axis, robot center to process chamber center | 极限(Ultimate)1440mm | |
| θ轴θ-axis | 无穷反转展转Infinite Rotation | |
quanluchengzuixiaoshihou Minimum running time | Z轴Z-axis | 1s/35mm |
| R轴R-axis | 5s/伸出或缩回Extend or Retraction | |
| θ轴θ-axis | 5s/180° | |
fanfudingweijingdu Repeatability | θ轴（°）θ-Axis | ±0.01（3σ） |
| R轴（mm）R-Axis | ±0.1（3σ） | |
jixieshoudaiφ710mmfuzaihouzuixiaofanzhuanzhanzhuanzhijing Robot minimum turning diameter with Φ 710 mm load | 1530mm | |
shenchu1440mmfuzaizhijing710mmzuiqianduanxiachuiliang The front sag of robot which out of 1440mm with Φ 710 mm load | 5.5mm | |
| 反复定位精度Repeatability | ±0.2mm | |
| 耐真空度Base Pressure (Pa) | 10-6Pa | |
| 分量Weight | 机械抄本体Main-body | 100kg |
| 节制器Controller | 15kg | |
| 碰撞掩护Collision Protect Function | 盘片和机械手无毁伤/工位需从头校准 | |
